The 61st JSAP Spring Meeting, 2014

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09. Applied Materials Science » 9.4 Thermoelectric conversion

[19p-F11-1~18] 9.4 Thermoelectric conversion

Wed. Mar 19, 2014 1:15 PM - 6:15 PM F11 (F407)

4:15 PM - 4:30 PM

[19p-F11-12] Influence of Ga Implantation on Seebeck Coefficient of P-doped SOI Layer

○Yuhei Suzuki1, Salleh Faiz1,2, Hiroya Ikeda1 (RIE Shizuoka Univ.1, JSPS Research Fellow2)

Keywords:サーモパイル型赤外線センサ,ゼーベック係数,イオン注入