Nanoparticle growth in reactive plasmas and plasma fluctuation

Presentation information

Oral presentation

08. Plasma Electronics » 8.5 Plasma nanotechnology

Wed. Mar 19, 2014 2:00 PM - 5:15 PM F3 (F301)

2:45 PM - 3:00 PM

^○Masaharu Shiratani¹, Kazunori Koga¹, Giichiro Uchida², Kunihiro Kamataki¹, Hyunwoong Seo¹, Naho Itagaki¹ (Kyushu Univ.¹, Osaka Univ.²)

Keywords:ナノ粒子,反応性プラズマ,揺らぎ