The 61st JSAP Spring Meeting, 2014

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Oral presentation

01. Applied Physics in General » 1.8 Metrology

[19p-F5-1~5] 1.8 Metrology

Wed. Mar 19, 2014 2:00 PM - 3:15 PM F5 (F305)

3:00 PM - 3:15 PM

△ [19p-F5-5] Development of diffusion cell and generation chamber in multi-gas trace-moisture generator

○Minami Amano1, Hisashi Abe1 (NMIJ/AIST1)

Keywords:湿度,微量水分,拡散管法