The 61st JSAP Spring Meeting, 2014

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Oral presentation

08. Plasma Electronics » 8.4 Plasma etching

[19p-F6-1~18] 8.4 Plasma etching

Wed. Mar 19, 2014 2:00 PM - 7:00 PM F6 (F306)

5:00 PM - 5:15 PM

[19p-F6-12] Generation and evaluation of CO clusters for cluster beams

○kazuhiro karahashi1, toshio seki2, jiro matsuo2, satoshi hamaguchi1 (Osaka Univ.1, Kyoto Univ.2)

Keywords:クラスター,磁性体