[19p-F8-1~17] 5.3 Optical Control

[19p-F8-3] Carrier-Injection Refractive Index Change in Low Temperature Deposited Silicon Waveguide

^○Ryohei Takei^1,2, Yuriko Maegami^1,2, Shoko Manako^1,2, Emiko Omoda^1,2, Tomoya Yoshida^1,2, Jyunichi Fujikata^2,3, Youichi Sakakibara^1,2, Masahiko Mori^1,2, Toshihiro Kamei^1,2 (AIST¹, PECST², PETRA³)

Keywords:アモルファスシリコン,シリコンフォトニクス,光変調器