[19p-F8-1~17] 5.3 Optical Control

[19p-F8-7] Ultra-small butt-joint Ge Photodetectors fabricated with self-flattened n⁺ Ge growth

^○Makoto Miura^1,2, Junichi Fujikata^1,2, Masataka Noguchi^1,2, Yasuhiko Arakawa^1,3 (PECST¹, PETRA², IIS, Univ. Tokyo³)

Keywords:受光素子,ゲルマニウム,エピタキシャル成長