[19p-F8-1~17] 5.3 Optical Control

[19p-F8-9] Spectroscopic Sensitivity of SOI Photodiode with Metallic Hole-Array Grating

^○Hiroaki Satoh^1,2, Shohei Iwata¹, Atsushi Ono^1,2, Hiroshi Inokawa^1,2 (Shizuoka Univ.¹, Shizuoka Univ.²)

Keywords:回折格子,分光感度特性,SOIフォトダイオード