The 61st JSAP Spring Meeting, 2014

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15. Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

[19p-F9-1~17] 15.8 Crystal evaluation, impurities and crystal defects

Wed. Mar 19, 2014 1:00 PM - 5:45 PM F9 (F401)

1:00 PM - 1:15 PM

[19p-F9-1] Effect of thermal stress on critical v/G value in growing single crystal Si

○Koji Sueoka1, Eiji Kamiyama1 (Okayama Pref. Univ.1)

Keywords:点欠陥,Si結晶育成,臨界(v/G)