[19p-F9-1~17] 15.8 Crystal evaluation, impurities and crystal defects

[19p-F9-16] Dislocation glide motion in various SiGe epi-films doped with Sb

^○Shinya Maki¹, Tatsuya Fushimi², Yoshifumi Yamashita², Yutaka Ohno³, Ichirou Yonenaga³, Takeshi Nishikawa², Yasuhiko Hayashi² (okayamadaikou¹, okayamadaiinshizen², touhokudaigakukinken³)

Keywords:転位