[19p-PA2-1~9] 1.3 Novel Technologies and Frontier Engineering Science

[19p-PA2-4] Measurement of the X-ray production range in Copper by EDX analysis using the multilayer film structure

^○Mina Sato¹, Akihiro Matsutani¹, Masato Sone² (Tokyo Tech. Semiconductor and MEMS Processing Center¹, Tokyo Tech. P&I Laboratory²)

Keywords:X線