[19p-PA2-1~9] 1.3 Novel Technologies and Frontier Engineering Science

[19p-PA2-6] Fabrication and Characterization of TiO2 Photonic Crystals Using Angled Dry Etching

^○Sachiko Matsushita¹, Daito Kobayashi¹, Akihiro Matsutani², Kunio Nishioka², Dai Shoji², Mina Sato², Toshihiro Isobe¹, Akira Nakajima¹, Tetsu Tatsuma³ (Tokyo Tech¹, MEMS, Tokyo Tech.², IIS, Univ. Tokyo³)

Keywords:フォトニック結晶,太陽電池,酸化チタン