[19p-PA5-1~7] 1.7 Instrumentation and measurement

[19p-PA5-2] The particle distribution evaluation by particle detection in space

^○（M2）Takahiro Shimizu¹, Ryunosuke Arita¹, Toshiaki Tanaka², Masao Yoshioka², Hiroshi Kubota¹ (Kumamoto Univ. Graduate School of Science and Technology¹, Faculty of Engineering, Kumamoto Univ.²)

Keywords:パーティクル,検出技術,半導体