The 61st JSAP Spring Meeting, 2014

Presentation information

Print

Poster presentation

13. Semiconductors A (Silicon) » 13.2 Insulator technology

[19p-PG2-1~12] 13.2 Insulator technology

Wed. Mar 19, 2014 4:00 PM - 6:00 PM PG2 (G棟2階)

4:00 PM - 6:00 PM

[19p-PG2-12] Effect of additional metal atoms in ALD-Al2O3/InGaAs interface

○Toshiyuki Yoshida1 (Shimane Univ.1)

Keywords:III-V族半導体,ALD,界面特性