[19p-PG2-1~12] 13.2 Insulator technology

[19p-PG2-9] Oxidation of Ge Surface by Microwave-generated Oxygen Radical Irradiation

^○Kosei Yanachi¹, Rikii Harada¹, Byeonghak Yoo¹, Keita Seki², Hiroki Ishizaki¹, Yohei Otani¹, Tetsuya Sato², Yukio Fukuda¹ (Tokyo Univ. of Science, Suwa¹, Univ. of Yamanashi²)

Keywords:GeO2