[19p-PG3-1~32] 13.3 Si Process・Interconnect・MEMS・Integration

[19p-PG3-1] A Design of Sub-1G MEMS Accelerometer

^○Daisuke Yamane¹, Toshifumi Konishi², Takaaki Matsushima², Hiroyuki Ito¹, Noboru Ishihara¹, Hiroshi Toshiyoshi³, Katsuyuki Machida^1,2, Kazuya Masu¹ (Tokyo Inst. of Tech.¹, NTT-AT², The Univ. of Tokyo³)

Keywords:MEMS,加速度センサ,Accelerometer