[19p-PG3-1~32] 13.3 Si Process・Interconnect・MEMS・Integration

△ [19p-PG3-19] Crystallization of Ge Thin Films by Cosputtering of Ge and Au

^○Takatoshi Sugiyama¹, Masao Kamiko², Kentaro Kyuno¹ (Shibaura Institute of Technology¹, Institute of Industrial Science, University of Tokyo²)

Keywords:ポリシリコン