The 61st JSAP Spring Meeting, 2014

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Poster presentation

13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[19p-PG3-1~32] 13.3 Si Process・Interconnect・MEMS・Integration

Wed. Mar 19, 2014 4:00 PM - 6:00 PM PG3 (G棟2階)

4:00 PM - 6:00 PM

[19p-PG3-22] Enhancement of Crystal Growth of Polycrystalline Si grain by Visible Laser Irradiation

○Naoya Kawamoto1, Kazuyuki Tadatomo1, Akira Heya2, Naoto Matsuo2 (Yamaguchi Univ.1, Univ. of Hyogo2)

Keywords:多結晶シリコン