[20a-D1-1~9] 4.7 Laser processing

▲ [20a-D1-5] High-quality metal patterning in glass microfluidic structures using water-assisted femtosecond laser direct-write ablation followed by electroless plating

^○Jian Xu¹, Hiroyuki Kawano¹, Dong Wu¹, Katsumi Midorikawa¹, Koji Sugioka¹ (RIKEN¹)

Keywords:metal patterning,femtosecond laser modification,electroless plating