Fabrication of BaSi<sub>2</sub> Thin Films on Si Substrates by Vacuum Deposition

Presentation information

Oral presentation

14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.1 Physical properties of exploratory materials

Thu. Mar 20, 2014 9:00 AM - 12:00 PM D3 (D114)

11:30 AM - 11:45 AM

^○（B）Yoshihiko Nakagawa¹, Kosuke Hara^1,2, Noritaka Usami^1,2, Takashi Suemasu^2,3 (Nagoya Univ.¹, JST-CREST², Univ. of Tsukuba³)

Keywords:バリウムシリサイド,真空蒸着