The 61st JSAP Spring Meeting, 2014

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13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[20a-E14-1~10] 13.3 Si Process・Interconnect・MEMS・Integration

Thu. Mar 20, 2014 9:00 AM - 11:45 AM E14 (E302)

11:30 AM - 11:45 AM

[20a-E14-10] Analysis of electronic states of sulfur atoms modulating NiSi/Si Schottky barrier height

○Takao Marukame1, Masahiko Yoshiki1, Yoshifumi Nishi1, Koichi Kato1, Yuichiro Mitani1 (Toshiba R&D center1)

Keywords:NiSi/Si,ショットキー