The 61st JSAP Spring Meeting, 2014

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13. Semiconductors A (Silicon) » 13.3 Si Process・Interconnect・MEMS・Integration

[20a-E14-1~10] 13.3 Si Process・Interconnect・MEMS・Integration

Thu. Mar 20, 2014 9:00 AM - 11:45 AM E14 (E302)

10:30 AM - 10:45 AM

[20a-E14-6] Activation of phosphorous in silicon by soft x-ray irradiation using H3PO4 solution

○Akira Heya1, HIrano Shota1, Fumito Kusakabe1, Naoto Matsuo1, Kazuhiro Kanda2 (Dept. Mat. Sci. Chem. Univ. of Hyogo1, LASTI Univ. of Hyogo2)

Keywords:不純物活性化,軟X線,リン