[20a-E2-1~12] 17.4 Device application

[20a-E2-6] Fabrication and Evaluation of 20-nm-Wide Multi-Layer Graphene Interconnects

^○Haruhisa Nakano¹, Boo Zhou¹, Akiko I¹, Daiyu Kondo¹, Kenjiro Hayashi¹, Makoto Takahashi¹, Katsunori Yagi¹, Shintaro Sato¹, Naoki Yokoyama¹ (AIST¹)

Keywords:グラフェン,配線,細線化