Crystalline Deformation of YSZ by Ion Implantation and Its Recovery by the Following Thermal Treatment

Presentation information

Oral presentation

09. Applied Materials Science » 9.1 Dielectrics, ferroelectrics

Thu. Mar 20, 2014 9:00 AM - 11:45 AM F11 (F407)

10:45 AM - 11:00 AM

^○Shoji Kaneko¹, Yosuke Horii¹, Takaaki Morimoto¹, Yoshimichi Ohki¹ (Waseda Univ.¹)

Keywords:High-k, Dielectric, YSZ, Crystal, Ion Irradiation, Anneal, ESR, XRD