[20p-D6-1~8] 6.4 New thin-film materials

[20p-D6-4] Preparation of SnO₂ films by surface discharge technique with various atomosphere

Masato Tan¹, Syota Kanezashi¹, Toshimichi Hanai¹, ^○Masayuki Okuya¹ (Shizuoka Univ.¹)

Keywords:沿面放電,プラズマ,酸化スズ