The 61st JSAP Spring Meeting, 2014

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14. Semiconductors B (Exploratory Materials, Physical Properties, Devices) » 14.3 Electron devices and Process technology

[20p-D8-1~8] 14.3 Electron devices and Process technology

Thu. Mar 20, 2014 1:00 PM - 3:00 PM D8 (D215)

2:45 PM - 3:00 PM

[20p-D8-8] Surface Segregation Prediction System: SurfSeg

○Michiko Yoshitake1 (NIMS1)

Keywords:薄膜,拡散バリア,故障解析