[20p-E14-1~4] 13.3 Si Process・Interconnect・MEMS・Integration

[20p-E14-1] Effects of impurities and defects on Schottky barrier modulation by S-pair in Si

^○Koichi Kato¹, Takao Marukame¹, Yoshifumi Nishi¹, Yuichiro Mitani¹ (Toshiba R&D Cent.¹)

Keywords:ショットキー,硫黄,不純物