[20p-E14-1~4] 13.3 Si Process・Interconnect・MEMS・Integration

△ [20p-E14-3] Observation of Copper Dissolution under Laminar Flow in a Microfluidic Channel - Impact of Dissolved Oxygen on Copper Dissolution–

^○Yosuke Mori¹, Takahiro Suzuki¹, Chikako Takato², Masanori Hayase¹ (Tokyo Univ. Sci.¹, Ebara Corp.²)

Keywords:銅,腐食