The 61st JSAP Spring Meeting, 2014

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13. Semiconductors A (Silicon) » 13.4 Devices/Integration Technologies

[20p-F12-1~6] 13.4 Devices/Integration Technologies

Thu. Mar 20, 2014 1:30 PM - 3:00 PM F12 (F408)

1:30 PM - 1:45 PM

[20p-F12-1] EDMR Study of RTS after NBT Stress

○Yoshiki Yonamoto1 (Hitachi, Ltd., Yokohama Laboratory1)

Keywords:NBTI,RTS