[20p-F2-1~7] 2.3 Application of radiation, radiation generators and technologies

[20p-F2-7] Development of Fabrication Technique of Embedded-microstructures in Single Crystal CVD Diamond by Proton Beam Writing

^○Yuya Kanbayashi¹, Wataru Kada¹, Ryota Saruya¹, Atsushi Kubota¹, Takahiro Satoh², Masashi Koka², Yasuyuki Isii², Tomihiro Kamiya², Kenta Miura¹, Osamu Hanaizumi¹ (Gunma Univ.¹, JAEA/TARRI²)

Keywords:ダイヤモンド,diamond,プロトン