9:45 AM - 10:00 AM
△ [13a-1C-4] Evaluation of Poly-Si Thin Film by Raman Spectroscopy and Lifetime Measurement Using UV Excitation
Keywords:Raman Spectroscopy,poly-Si,Lifetime
Presentation information
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology
[13a-1C-1~10] 13.4 Si wafer processing /MEMS/Integration technology
Sun. Sep 13, 2015 9:00 AM - 11:45 AM 1C (135)
座長:河本 直哉(山口大),松尾 直人(兵庫県立大)