[13a-2A-1~10] 3.2 Equipment optics and materials

[13a-2A-5] Investigation of polarization characteristics in UV wavelength region of sub-wavelength grating by considering complex dispersion relation of eigen mode

〇Yuusuke Takashima¹, Masato Tanabe¹, Masanobu Haraguchi^1,2, Yoshiki Naoi^1,2 (1.ATS, Tokushima Univ., 2.STS, Tokushima Univ.)

Keywords:polarization,sub-wavelength grating