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△ [13a-2Q-5] Orientation dependent Li-incorporation into Cu3N thin films
Keywords:copper nitride,epitaxial,Li insertion
In our previous study, we reported nonmetal-metal transition in Li-incorporated Cu3N polycrystalline films. Currently, we examine the relationship between Li-incorporation behavior and the orientation of Cu3N films. We revealed that the concentration of incorporated Li in Cu3N epitaxial films was much larger than that in polycrystalline ones. As a result, electronic properties of epitaxial films and polycrystalline ones were found to be substantially different. In this presentation, we present the orientation dependent Li-incorporation and the difference in the electronic properties.