[13a-2S-1~8] 3.15 Silicon photonics

[13a-2S-4] Amorphous Silicon Apodized Grating Coupler for Multilayer Waveguides

〇Yuki Kuno¹, JoonHyun Kang¹, Kazuto Itoh¹, Yusuke Hayashi¹, Junichi Suzuki¹, Tomohiro Amemiya², Nobuhiko Nishiyama¹, Shigehisa Arai^1,2 (1.Tokyo Inst. Tech., 2.Nanoelectron. Res. Center)

Keywords:Silicon Photonics,Grating Coupler

Inter-layer coupling between multilayer waveguides for on-chip interconnection was demonstrated using hydrogenated amorphous silicon (a-Si:H) grating couplers with metal mirrors. The fabricated device which has the inter-layer distance of 2 µm showed wider bandwidth compared with uniform grating structure.