[13a-4C-1~12] 13.3 Insulator technology

[13a-4C-11] Structural analysis of ferroelectric Hf(Y)O by infrared spectroscopy

〇Tsunehiro Ino¹, Yasushi Nakasaki¹, Shosuke Fujii¹, Daisuke Matushita¹ (1.Toshiba Corporation)

Keywords:ferroelectric,hafnium,Hf

We obtained the infrared vibrational spectra of the Pbc2₁ phase and Pbca phase by first principle calculation using PHASE program, which is difficult to distinguish by XRD experiments. The FTIR spectra of ferroelectric Hf(Y)O was very different from the calculated vibrational spectra of Pbca phase. The main phase of Hf(Y)O is considered to be Pbc2₁ phase, but not P4₂/nmc phase nor P2₁/c phase.