11:00 AM - 11:15 AM
[13a-4C-8] Fabrication and Evaluation of ZrO2/Si Structure using ECR Sputtering
Keywords:High Dielectric Material,Zirconia,Electron Cyclotron Resonance Sputtering
Oral presentation
13 Semiconductors » 13.3 Insulator technology
Sun. Sep 13, 2015 9:00 AM - 12:15 PM 4C (432)
座長:渡邉 孝信(早大),右田 真司(産総研)
11:00 AM - 11:15 AM
Keywords:High Dielectric Material,Zirconia,Electron Cyclotron Resonance Sputtering