The 76th JSAP Autumn Meeting, 2015

Presentation information

Symposium

Symposium » Trend of Functional Atomic Thin Film Application

[13p-1A-1~15] Trend of Functional Atomic Thin Film Application

Sun. Sep 13, 2015 1:15 PM - 6:15 PM 1A (131+132)

座長:安藤 淳(産総研),吹留 博一(東北大)

3:30 PM - 4:00 PM

[13p-1A-7] Transition Metal Dichalcogenides as a Channel Material for Ultra-Thin Body MOSFETs

〇Takahiro Mori1, Naruki Ninomiya1,2, Noriyuki Uchida1, Toshitaka Kubo1, Eiichiro Watanabe3, Daiju Tsuya3, Satoshi Moriyama3, Masatoshi Tanaka2, Atsushi Ando1 (1.AIST, 2.YNU, 3.NIMS)

Keywords:transition metal dichalcogenides,MOSFET

We review transistion metal dichalcogenides as a channel material for ultra-thin body MOSFETs and report our recent research progress on high-k/metal gate MoS2 MOSFETs.