[13p-1B-1~10] Progress of semiconductor wet processing - from silicon to compound -

[13p-1B-5] Carbon Plating by Molten Salt Electrochemical Process

〇Hiroyuki Tsujimura¹, Tokujiro Nishikiori¹, Yasuhiko Ito¹ (1.I'MSEP Co., Ltd.)

Keywords:carbon,electroplating,molten salt

Electrochemical carbon plating processes have been studied. A dense and adherent carbon film coating can be achieved by the anodic oxidation of C₂²⁻ ions dissolved in a molten salt. The obtained carbon-coated metal shows advantageous features for materials of energy devices such as a current collector for high-capacity electrochemical capacitor, Li-ion secondary battery, and so on.