The 76th JSAP Autumn Meeting, 2015

Presentation information

Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[13p-1D-1~26] 15.4 III-V-group nitride crystals

Sun. Sep 13, 2015 1:15 PM - 8:15 PM 1D (141+142)

座長:斉藤 真(三菱化学),岡田 成仁(山口大),岩谷 素顕(名城大)

6:15 PM - 6:30 PM

[13p-1D-19] Study on the Growth of AlInN by Radical Enhanced Metal Organic Chemical Vapor Deposition

〇kazuki iwamoto1, Yi Lu1, Shinnosuke Takai1, Osamu Oda1, Hiroki Kondo1, Kenji Ishikawa1, Makoto Sekine1, Masaru Hori1 (1.Nagoya Univ.)

Keywords:AlInN,low-temperature growth,REMOCVD