6:15 PM - 6:30 PM
△ [13p-1D-19] Study on the Growth of AlInN by Radical Enhanced Metal Organic Chemical Vapor Deposition
Keywords:AlInN,low-temperature growth,REMOCVD
Oral presentation
15 Crystal Engineering » 15.4 III-V-group nitride crystals
Sun. Sep 13, 2015 1:15 PM - 8:15 PM 1D (141+142)
座長:斉藤 真(三菱化学),岡田 成仁(山口大),岩谷 素顕(名城大)
6:15 PM - 6:30 PM
Keywords:AlInN,low-temperature growth,REMOCVD