The 76th JSAP Autumn Meeting, 2015

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15 Crystal Engineering » 15.4 III-V-group nitride crystals

[13p-1D-1~26] 15.4 III-V-group nitride crystals

Sun. Sep 13, 2015 1:15 PM - 8:15 PM 1D (141+142)

座長:斉藤 真(三菱化学),岡田 成仁(山口大),岩谷 素顕(名城大)

7:45 PM - 8:00 PM

[13p-1D-25] STEM observations of the self-generated micro-cracks in ultra-thin AlN/GaN super-lattice grown on Si(110) substrates

〇Xu-Qiang Shen1, Tokio Takahashi1, Toshihide Ide1, Mitsuaki Shimizu1 (1.AIST)

Keywords:Nitride

Last time, we have reported the effect of the ultra-thin AlN/GaN super-lattice interlayer on the GaN epilayer grown on it. In this paper, we report the observations of the self-generated micro-cracks in the super-lattice by STEM.