4:00 PM - 4:15 PM
▲ [13p-1F-8] Plasma-Induced Damage of GaN by Chlorine-containing Plasma
Keywords:plasma-induced plasma,gallium nitride,in-situ monitoring
Oral presentation
8 Plasma Electronics » 8.0 Plasma Electronics English Session
Sun. Sep 13, 2015 2:30 PM - 6:45 PM 1F (Reception Hall 1)
Chair:Fumiyoshi Tochikubo(Tokyo Metropolitan Univ.),Hiroshi Akatsuka(Titech)
4:00 PM - 4:15 PM
Keywords:plasma-induced plasma,gallium nitride,in-situ monitoring