[13p-2E-1~16] 3.1 Basic optics and frontier of optics

△ [13p-2E-13] High-Resolution Observation of Ultrafine Bubble by Electron Beam Irradiation

〇(M1C)Naoto Hara¹, Nawa yasunori², Inami Wataru^1,2, Kawata Yoshimasa^1,2, Kobayashi Hideaki³, Maeda Shigeo³, Fujita Toshihiro³ (1.Sizuoka Univ., 2.Sizuoka Univ. RIE, 3.IDEC Inc.)

Keywords:Electron beam,cathodoluminescence,Ultrafine bubble

In this study, we attempted to observe bubbles in water by electron beam excitation light . It is difficult to analyze nano-sized bubbles in detail because its size is smaller than the resolution of microscope, and exists in water. In this study, we excite the nano-sized bubbles by electronbeam directly with a thin vucuum filme. By using this method it is expected to observe nano-sized bubbles and analyze the internal elements.