The 76th JSAP Autumn Meeting, 2015

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6 Thin Films and Surfaces » 6.4 Thin films and New materials

[13p-2Q-1~27] 6.4 Thin films and New materials

Sun. Sep 13, 2015 1:15 PM - 8:30 PM 2Q (231-1)

座長:西川 博昭(近畿大),田中 勝久(京大),名村 今日子(京大),篠田 健太郎(産総研)

6:00 PM - 6:15 PM

[13p-2Q-18] Annealing temperature dependence of fixed charges in Sr2SiO4 thin films prepared from a target Sr2SiO4by PLD

〇(M2)Keiji Imanishi1, Shota Taniwaki1, Mitsuhiro Umano1, Haruhiko Yoshida1, Koji Arafune1, Shin-ichi Satoh1, Yasushi Hotta1 (1.Univ.of Hyogo)

Keywords:strontium silicate,fixed charge