[13p-2S-1~15] 3.15 Silicon photonics

▲ [13p-2S-3] Investigation of high-frequency pulse width modulation of thermo-optic phase shifters using monolithically integrated MOSFET on silicon photonics platform

〇Guangwei Cong¹, Takashi Matsukawa¹, Keijiro Suzuki¹, Ken Tanizawa¹, Sanghun Kim¹, Tadashi Chiba¹, Hirofumi Tadokoro¹, Masashi Yanagihara¹, Morifumi Ohno¹, Haruhiko Kuwatsuka¹, Yasushi Igarashi¹, Meishoku Masahara¹, Hiroshi Ishikawa¹, Kazuhiro Ikeda¹, Namiki Shu¹, Yamada Koji¹, Hitoshi Kawashima¹ (1.AIST)

Keywords:thermo-optic Mach-Zehnder switch,silicon photonic-electronics integration,pulse width modulation

Thermo-optic (TO) phase shifters in silicon photonics can be driven by the pulse width modulation (PWM) method using our established monolithic integrated MOSFET. Whether the high PWM frequency is better is not clear so far, and we answered this question in this study.