14:30 〜 14:45
▲ [13p-2T-3] Fabrication and testing of compact thermoelectric module based on ZnO and Ca3Co4O9 thin films
キーワード：Thermoelectric module,thin film oxides
Compact thin film modules (5 legs of n-type: Al0.02Zn0.98O, AZO; 5 legs of p-type: Ca3Co4O9) were fabricated on Al2O3, SrTiO3 (STO) single crystal and fused silica substrates by pulsed laser deposition (PLD).
Performance of modules was evaluated using ad-hoc customized system where the module was set vertically. The largest output power was obtained on Al2O3 with Thot-Tcold = 230 °C: Pmax =29.9 pW. This result is encouraging for the practical applications of thermoelectric oxide thin films, looking forward to the fabrication of modules on flexible substrates for ubiquitous harvesting of the waste heat.
Performance of modules was evaluated using ad-hoc customized system where the module was set vertically. The largest output power was obtained on Al2O3 with Thot-Tcold = 230 °C: Pmax =29.9 pW. This result is encouraging for the practical applications of thermoelectric oxide thin films, looking forward to the fabrication of modules on flexible substrates for ubiquitous harvesting of the waste heat.