[13p-2U-1~9] 17.3 Exploration of new functions and evaluation of basic properties

[13p-2U-2] Diameter and quality dependent electrical properties of carbon nanotube

〇Ken Nishiura¹, Junichiro Tokutomi¹, Masaya Fujioka², Masashi Tanaka², Yoshihiko Takano² (1.Yazaki Corp., 2.NIMS)

Keywords:Carbon nanotube

Electrical properties of individual multi-walled carbon nanotubes (CNT) on Si/SiO₂ substrate were investigated. Au/Ti electrodes were fabricated by electron beam lithography method. Electrical conductivity was measured by 4-terminal method in low temperature probing system. Conductivity was improved with increase in temperature and diameter. We will discuss electrical properties based on the dependence of CNT diameter and quality.