2:15 PM - 2:30 PM
[13p-2W-5] Thermal stability of compressively strained Si/Si1-xCx heterostructures formed with the defect control by ion implantation
Keywords:strained Si,ion implantation,thermal stability
Oral presentation
15 Crystal Engineering » 15.5 Group IV crystals and alloys
Sun. Sep 13, 2015 1:15 PM - 5:30 PM 2W (234-2(North))
座長:黒澤 昌志(名大),都甲 薫(筑波大)
2:15 PM - 2:30 PM
Keywords:strained Si,ion implantation,thermal stability