[13p-4F-1~9] Science and recent trend of liquid silicon

[13p-4F-1] Properties and Applications of Liquid Silicon Materials from Cyclopentasilane

〇Tatsuya Shimoda¹ (1.JAIST)

Keywords:Cyclopentasilane,Liquid silicon,Liquid process

Cyclopentasilane (CPS) is relatively a stable material among hydrosilane ones. A series of materials necessary for Si semiconductor devices can be synthesized by using CPS. Polydihydrosilane, which is synthesized by the UV polymerization, is dissolved into hydrocarbon solvent to become a so-called silicon ink. A solid silicon film can be produced by annealing the polydihydrosilane film which is coated on a substrate using the silicon ink. We have researched the individual production step in the production steps from CPS to a solid film and materials appearing in each step to clarify the all aspects of liquid silicon technology.