[13p-4F-1~9] Science and recent trend of liquid silicon

[13p-4F-6] Deterioration properties of a-Si films formed using liquid Si under air exposure

〇(M2)CHENG GUO¹, Keisuke Ohdaira¹, Hideyuki Takagishi², Takashi Masuda¹, Tatsuya Shimoda¹ (1.Jaist, 2.Fukushima Univ.)

Keywords:liquid silicon,amorphous silicon