[14a-1C-1~10] 13.4 Si wafer processing /MEMS/Integration technology

△ [14a-1C-3] Vertically integrated flexible CMOS circuit with temperature sensor

〇Wataru Honda¹, Shingo Harada¹, Ishida Shohei¹, Takayuki Arie¹, Seiji Akita¹ (1.Osaka Pre. Univ.)

Keywords:flexible device,vertical integration,temperature sensor

In this study, we realize a low power consumption CMOS circuit using carbon nanotube network thin film transistor(TFT) and InGaZnO TFT on a flexible substrate. And we propose a vertical integration of these TFTs and sensors to achive high integration tecqunics . In this report, we report electrical and mechanical characteristics of vertically integrated flexible CMOS circuit with temperature sensor.